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Investigation of current–voltage characteristics of vertically stacked all-NbCN Josephson junctions

Authors
Journal
Applied Superconductivity
0964-1807
Publisher
Elsevier
Publication Date
Volume
5
Identifiers
DOI: 10.1016/s0964-1807(98)00058-1

Abstract

Abstract Current–voltage characteristics of vertically stacked all-NbCN Josephson junctions has been investigated with a purpose to use them as an element of integrated circuits. It has been shown that increases of microwave power in the junction definition process using electron cyclotron resonance (ECR) etching causes reduction of the junction quality parameter. From results of a measurement of current–voltage characteristics for an array composed of five-fold vertically stacked NbCN/MgO/NbCN junctions, it has been found that a very high uniformity in critical currents can be achieved.

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