Affordable Access

Publisher Website

Preparation of hydrogenated amorphous germanium by reactive thermal evaporation

Authors
Journal
Solid State Communications
0038-1098
Publisher
Elsevier
Publication Date
Volume
53
Issue
11
Identifiers
DOI: 10.1016/0038-1098(85)90476-4

Abstract

Abstract Hydrogenated amorphous germanium was prepared by the thermal evaporation of high purity polycrystalline germanium in an atmosphere of hydrogen plasma produced by high voltage AC discharge of molecular hydrogen. The addition of hydrogen during the thermal evaporation of germanium is shown to improve the electrical properties of the resulting amorphous germanium films considerably by saturation of dangling bonds, if the dissociation of molecular hydrogen takes place. Hydrogenated sample deposited at 200°C has shown a high resistivity and an activation type conduction (with an activation energy of 0.38–0.39 eV) in measuring temperature range (above room temperature).

There are no comments yet on this publication. Be the first to share your thoughts.