3D electrostatic actuator fabricated by non-ablative femtosecond laser exposure and chemical etching

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3D electrostatic actuator fabricated by non-ablative femtosecond laser exposure and chemical etching

Authors
Type
Published Article
Journal
MATEC Web of Conferences
2261-236X
Publisher
EDP Sciences
Publication Date
Volume
32
Identifiers
DOI: 10.1051/matecconf/20153202003
Source
EDP Sciences

Abstract

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