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Ion-beam synthesis of new phases in silicon interpreted as the decay of a supersaturated solid solution

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DOI: 10.1016/b978-0-444-89418-2.50009-6

Abstract

An approach has been suggested for the study of substoichiometric ion-beam synthesis (IBS) as a process of decay of a supersaturated solid state solution. It is supposed in this approach that the possibilities for IBS can be considerably expanded with the use of this process based on the mass transport of reactive impurities to specially created centres of nucleation.

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