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Excimer laser mixing of nickel overlayers on silicon carbide

Authors
Journal
Materials Letters
0167-577X
Publisher
Elsevier
Publication Date
Volume
3
Identifiers
DOI: 10.1016/0167-577x(85)90017-5
Disciplines
  • Chemistry

Abstract

Abstract We have investigated mixing and alloying phenomena of nickel overlayers on silicon carbide induced by nanosecond laser pulses (wavelength 0.248 μm and pulse duration 35 ns) of a krypton fluoride laser. Rutherford backscattering results showed uniform mixing of nickel layers with Ni 84Si 16 average chemical composition. Structural and chemical analyses were conducted by high-resolution and analytical electron microscopy techniques using cross-section (TEM) specimens. The results show the presence of amorphous and crystalline phases in the mixed layer. The details of these results are discussed.

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