Abstract We have investigated mixing and alloying phenomena of nickel overlayers on silicon carbide induced by nanosecond laser pulses (wavelength 0.248 μm and pulse duration 35 ns) of a krypton fluoride laser. Rutherford backscattering results showed uniform mixing of nickel layers with Ni 84Si 16 average chemical composition. Structural and chemical analyses were conducted by high-resolution and analytical electron microscopy techniques using cross-section (TEM) specimens. The results show the presence of amorphous and crystalline phases in the mixed layer. The details of these results are discussed.