Affordable Access

Publisher Website

Low-temperature preparation of MoS2thin films on glass substrate with NaF additive

Thin Solid Films
Publication Date
DOI: 10.1016/s0040-6090(01)01546-2
  • Thin Film
  • Mos2
  • Crystalline Properties
  • Textured Films


Abstract Molybdenum disulfide thin films have been prepared by annealing, under constant argon flow at 823 K, structures composed of molybdenum, sulfur and sodium fluorine co-deposited on glass substrates. The films have been studied by X-ray diffraction, X-ray photoelectron spectroscopy, electron microprobe analysis and scanning electron microscopy. After annealing, the thin films were composed of large grains having their c-axis perpendicular to the plane of the substrate when they are deposited at a substrate temperature below 500 K. It is shown that these crystalline properties are induced by the presence of sodium in the films, which allows the formation of an intermediate solid solution during annealing. This solid solution is decomposed with textured MoS 2 growth when the films are exposed to air.

There are no comments yet on this publication. Be the first to share your thoughts.