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ASML alignment sequence generator

Technische Universiteit Eindhoven
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  • Design
  • Law


This report presents the results of a graduation project for the completion of the Software Technology programme of the Stan Ackermans Institute of the Technical University of Eindhoven. The project was carried out in ASML, a company that designs, develops and produces photolithography machines. The project made an attempt to prove that the calibration sequence within an ASML machine can be automatically generated. The readers that are interested in the global overview of what has been developed can read the executive summary. The context, domain, problem and stakeholders information can be found in Chapter 1 to 3. For the readers interested in the requirements, considered approaches and design should read Chapter 4 to 6. The results, project management and a project retrospective can be found in Chapter 7 to 9. More detailed information about the implementation can be found in Appendix A and B.

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