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Interface observation using medium energy ion scattering with high energy resolution

Authors
Journal
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
0168-583X
Publisher
Elsevier
Publication Date
Volume
33
Identifiers
DOI: 10.1016/0168-583x(88)90645-3

Abstract

Abstract A medium energy (50–400 keV) ion scattering system, with the toroidal analyser corrected for the fringing field of the electrodes and coated with TIN to prevent the charge up effect in the low energy range, was developed for the quantitative structural and composition analysis of surfaces, interfaces and thin films. Preliminary experimental results to check the system were obtained. The rough estimation of the depth resolution was tried with SiO 2 (~10 nm)/Si(001), and also some results of SiC/Si(001) were obtained.

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