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Energy distribution of ions extracted from A 5 GHz ECR-ion source

Authors
Journal
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
0168-583X
Publisher
Elsevier
Publication Date
Volume
23
Identifiers
DOI: 10.1016/0168-583x(87)90443-5

Abstract

Abstract The energy distributions of ions in different charge states extracted from an ECR ion source were analysed using a double hemispherical energy analyser. The effect of the finite ion temperature can be separated from other mechanisms broadening the energy distribution. It is found that the ion temperature has only a small influence on the energetic width of the extracted ion beams. Additional broadening is enhanced by large extraction gaps and a large fieldstrength in the extraction gap. Pressure inside the source and applied microwave power turn out to be of negligible influence.

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