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Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5

Authors
Journal
Sensors and Actuators B Chemical
0925-4005
Publisher
Elsevier
Publication Date
Volume
43
Identifiers
DOI: 10.1016/s0925-4005(97)00157-3
Keywords
  • Electrolyte-Conductivity Sensors
  • Electrode-Substrate Structure
  • Ta2O5

Abstract

Abstract Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta 2O 5 have been realized. The electrodesubstrate structure under the Ta 2O 5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.

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