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A controller for automated and normalized data recording—Applied to measurement of line shape of spectral emission during ion beam sputteringfn2fn2 Dedicated to Prof. Hans o Lutz on the occasion of his 60th birthday.

Authors
Journal
Vacuum
0042-207X
Publisher
Elsevier
Publication Date
Volume
51
Issue
3
Identifiers
DOI: 10.1016/s0042-207x(98)00197-3
Disciplines
  • Design

Abstract

Abstract An inexpensive simple controller unit using readily available ICs has been designed and developed for automated and normalized data recording useful in the study of ion–solid interaction phenomena and other fields. The performance of the unit has been tested by measuring the Doppler profile of spectral lines during ion beam sputtering of a Si(100) target.

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