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Development and applications of CASEHAT—a multipurpose computer aided hazard analysis automation system used in semiconductor manufacturing industry

Authors
Journal
Journal of Loss Prevention in the Process Industries
0950-4230
Publisher
Elsevier
Publication Date
Volume
16
Issue
4
Identifiers
DOI: 10.1016/s0950-4230(03)00036-6
Keywords
  • Semiconductor
  • Process Safety
  • Hazard Analysis
  • Automation
  • Hazop
  • Risk Matrix
  • Information Inquiry
  • Saddle-Type Risk Surface
  • Casehat
Disciplines
  • Computer Science

Abstract

Abstract This paper introduces the procedures of developing a computer software—CASEHAT (Computer Aided Semiconductor Equipment Hazard Analysis Tool) that can facilitate different hazard analysis works for semiconductor manufacturing processes. The CASEHAT software is composed of three major parts: the material, the equipment, and the regulation database and they were connected through the ‘correlated linkage’ technique of the Microsoft Access and the VBA programming language. This innovative software not only generates ordinary HAZOP study (HAZard and OPerability study) results but also acts as an inquiry tool during usual conditions or in case of emergency. It is foreseeable that CASEHAT has great potential to be used in place of the current HAZOP procedure eventually.

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