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Physics of low density-of-states a-Si1−xCxfilms

Authors
Journal
Journal of Non-Crystalline Solids
0022-3093
Publisher
Elsevier
Publication Date
Identifiers
DOI: 10.1016/0022-3093(85)90793-8

Abstract

Abstract We give a report on a systematic study of the deposition conditions for the production of low-density-of-states carbonated a-Si:H from SiH 4-CH 4 mixtures. Two types of materials can be produced: in the “low powder-density regime”, there is no primary decay of the methane. The deposition rate is independent of the gas phase composition and the incorporation of carbon is low even at high methane concentration. In the “high power-density regime”, both gases are decomposed and silicon-carbon alloys in all proportions are obtained.

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