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A versatile, software configurable multichannel STEM detector for angle-resolved imaging

Authors
Journal
Ultramicroscopy
0304-3991
Publisher
Elsevier
Publication Date
Volume
54
Issue
1
Identifiers
DOI: 10.1016/0304-3991(94)90091-4

Abstract

Abstract A new type of STEM detector has been developed and tested. This detector consists of 30 rings which are split in quadrants (= 120 channels) and it allows further advantage to be taken of the image formation principle of STEM: the scattered electrons can be recorded separately according to their scattering angles and eight images can be acquired in parallel. Because of its electron counting capability, this detector is very well suited to analytical and quantitative applications of STEM (e.g. absolute mass determination and Z-contrast). The various channels of the detector can be combined by software in order to obtain images with the desired detector acceptance angles. The minimal time per pixel ( t/ pixel≥4 μs) is approximately as short as in the case of conventional single-channel detectors.

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