Affordable Access

Publisher Website

2.06 - Vibrating Gyroscopes

DOI: 10.1016/b978-044452190-3.00055-0
  • Angular Rate Sensor
  • Vibratory Gyroscopes


Silicon micromachined gyroscopes have gained immense popularity in the automotive and consumer electronics industry owing to their miniature size, low power consumption, and compatibility with regular Complementary Metal Oxide Semiconductor (CMOS) Integrated Circuit fabrication technology. Vibrating micromachined gyroscopes rely on the Coriolis-induced transfer of energy between two vibration modes of a microstructure. A comprehensive analysis of performance parameters, system blocks, and operation is presented in this chapter, which is illustrated succinctly with a mode-matched silicon tuning fork gyroscope as a case study.

There are no comments yet on this publication. Be the first to share your thoughts.


Seen <100 times

More articles like this

Impedance and modulus spectroscopy studies on Ba0....

on Materials Science and Engineer... Jan 01, 2006

New hollandite oxides: TiO2(H) and K0.06TiO2

on Journal of Solid State Chemist... Jan 01, 1989
More articles like this..