Affordable Access

Publisher Website

2.01 - Electrostatic Actuation

DOI: 10.1016/b978-044452190-3.00057-4


The chapter deals with the comprehensive description of electrostatic attractive force that is widely used for MEMS actuators, including the history of electrostatic mechanism, analytical simulation model of the parallel plates actuator along with representative examples of implementations such as comb-drive actuators, torsion mirror structure, scratch-drive actuator and electret actuator. The chapter also discusses characteristics of electrostatic actuators such as pull-in mechanism, negative spring constant effect and electrostatic drift.

There are no comments yet on this publication. Be the first to share your thoughts.