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130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements

Authors
  • Schwab, Lucien
  • Hentz, Sebastien
  • Favero, Ivan
  • Legrand, Bernard
  • Allain, Pierre-Etienne
  • Banniard, Louise
  • Mauran, Nicolas
  • Lagrange, Denis
  • Fafin, Alexandre
  • Gély, Marc
  • Hermouet, Maxime
  • Jourdan, Guillaume
Publication Date
Jan 27, 2019
Source
HAL-ENAC
Keywords
Language
English
License
Unknown
External links

Abstract

We show all-optical operation of a VLSI optomechanical micro-resonator designed for high resolution sensing applications. Mechanical resonance frequency is above 100 MHz with Q-factor of 1 000 in air, yielding measurement bandwidth above 100 kHz. We demonstrate low thermomechanical noise floor resolved with exquisite motion detection limit down to 4.10 -16 m.Hz -0.5 . This performance, enabled by optomechanical transduction, paves the way for very high-speed and ultra-sensitive sensing applications.

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