Affordable Access

Publisher Website

The role of surface steps in the asymmetric surface dislocation nucleation in vicinal heterostructures with compressive and tensile stresses

Authors
Journal
Surface Science Letters
0167-2584
Publisher
Elsevier
Publication Date
Volume
292
Issue
3
Identifiers
DOI: 10.1016/0167-2584(93)90879-n

Abstract

Abstract The surface nucleation of misfit dislocations in vicinal (001)-oriented heterostructures is discussed. It is shown that beside the asymmetrical stressing of opposite dislocation slip planes due to the vicinal substrate, the surface steps have a similar effect. The effect of the steps has the same-sign asymmetry for a compressive stressed epilayer, but is opposite in the tensile case. The effect on dislocation nucleation energy is calculated. For miscut angles used normally, the step energy contribution exceeds that due to the vicinal substrate. The effect on epilayer tilting is also discussed.

There are no comments yet on this publication. Be the first to share your thoughts.