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Optical and Langmuir Probe Investigations of Excitation Temperatures in a Low-Pressure Glow Discharge with Variations in Discharge Gas Identity

Authors
Journal
Microchemical Journal
0026-265X
Publisher
Elsevier
Publication Date
Volume
47
Identifiers
DOI: 10.1006/mchj.1993.1035
Disciplines
  • Mathematics

Abstract

Abstract In an effort to more fully understand the excitation and ionization mechanisms present in a low-pressure (0.3-3 Torr), low-current (0-5 mA), diode geometry glow discharge, preliminary studies of electron characteristics with variations in discharge pressure and fill gas identity were undertaken. For comparison, excitation temperatures were measured by both optical and Langmuir probe methods. Neither method showed electron excitation in the plasma to vary substantially with changes in discharge pressure or changes in discharge gas composition, including quenching with methane.

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