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DOI: 10.1016/s1386-2766(00)80013-4


Publisher Summary This chapter summarizes the content of all the chapters in the book, “Micro mechanical transducers”. After a short introduction, Professor Bao discusses the main issues relevant to silicon based mechanical sensors. First, a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is discussed, followed by a chapter on air damping. These chapters of basic discussion are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers, and resonant sensors in which the above principles are applied.

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