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Optimization of imaging energy filters for high-resolution analytical electron microscopy

Authors
Journal
Ultramicroscopy
0304-3991
Publisher
Elsevier
Publication Date
Volume
28
Identifiers
DOI: 10.1016/0304-3991(89)90291-x
Disciplines
  • Design

Abstract

Abstract A survey is given of recent progress made in the design of high-performance imaging energy filters for transmission electron microscopes. For accelerating voltages smaller than about 80 kV both the Zeiss-Castaing filter and the retarding Wien filter are well suited for high-resolution analytical electron microscopy. At higher voltages purely magnetic imaging filters are mandatory. Fully and partially corrected filters of the Ω and α type are discussed which allow energy selection with small energy windows without affecting the image formed by the transmitted electrons.

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