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Filter aids chip production

Journal
Membrane Technology
0958-2118
Publisher
Elsevier
Publication Date
Volume
2010
Issue
10
Identifiers
DOI: 10.1016/s0958-2118(10)70191-9
Keywords
  • News
Disciplines
  • Chemistry

Abstract

US-based filtration, separation and purification company Pall Corp has announced details of its next- generation, highly asymmetric membrane technology for semiconductor fabrication. The firm says that it pushes wet chemical filtration performance to a level of 10 nm and reduces energy costs.

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