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Optical simulation of the beam flux distribution from molecular beam epitaxy effusion sources

Authors
Journal
Vacuum
0042-207X
Publisher
Elsevier
Publication Date
Volume
43
Issue
4
Identifiers
DOI: 10.1016/0042-207x(92)90167-u

Abstract

Abstract On the basis of their previous work, the authors present new results on optical simulation of effusion molecular beams generated by MBE cells of cylindrical and conical shapes, with inclined surfaces of evaporated liquid charges. The obtained results show that application of a conical cell gives a molecular beamd with an intensity distribution with respect to the cell axis which is more symmetric than in the case of a cylindrical cell. The experiments presented in this paper have shown that the beam distributions obtained by the analytical calculations of Yamashita et al [ Jpn J Appl Phys, 26 , 1192 (1987)] for the same effusion cells are probably incorrect, while the relevant beam distributions obtained by Adamson et al [ J Vac Sci Technol, 87 , 487 (1989)] for the cylindrical cells with Monte Carlo calculations seem to be similar to the optical simulation data presented in this paper.

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