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Ion implantation effects in BaTiO3single crystals

Authors
Journal
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
0168-583X
Publisher
Elsevier
Publication Date
Identifiers
DOI: 10.1016/0168-583x(91)95799-j

Abstract

Abstract Thermally controlled helium implantation has been used to produce planar waveguides in BaTiO 3 without noticeable depoling effects in the samples. Profiles for the ordinary and extraordinary refractive index are deduced from optical mode measurements. No annealing procedure is required. We report the effects of different ion fluences and energies in the MeV range on the waveguide properties.

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