Pulsed aerosol injection is an appealing method to inject complex precursors in plasmas independently on their composition and thermodynamic characteristics. This method is implementable to form (multi)functional thin films in various plasma processes by pulse injecting colloidal solutions or by using a pulsed direct liquid reactor-injector of nano...
Purpose - The purpose of this paper is to review additive and/or subtractive manufacturing methods for metallic objects and their gradual evolution from prototyping tools to rapid manufacture of actual parts. Design/methodology/approach - Various existing rapid manufacturing (RM) methods have been classified into six groups, namely, CNC machining l...
The plasma enhanced chemical vapor deposition(PECVD) system was used for fabricating the silicon films with different hydrogen dilution ratio(RH) under the high power density, high pressure and low substrate temperature. High-resolution transmission electron microscopy(HRTEM) and Raman spectroscopy indicated that the thin films were nanocrystalline...
A series of transition films from amorphous to microcrystalline silicon was successfully prepared by very high frequency plasma enhanced chemical vapor deposition(VHF-PECVD).Effects of gas pressure on the microstructure, photoelectric and transport properties of the films were investigated.The results indicate that increase of gas pressure improve ...
Published in Inorganic Materials
We report the optical and electrical properties of a-Si:H and a-Si1 − xCx:H (x = 0.06, 0.17, 0.25,0.32) amorphous films produced by plasma deposition at constant hydrogen content. IR absorption data are used to evaluate the density of Si-H and C-H bonds and the hydrogen concentration in the films. The activation energy for conduction and the carrie...
Published in Inorganic Materials
Plasma deposition has been used to grow Si1−xGex:H(x= 0 − 1) films, undoped and doped with PH3 or B2H6, for p-i-n solar cells and other optoelectronic applications. The optical, electrical, and photoelectric properties of the films have been studied at constant hydrogenation and doping levels. The films deposited under appropriate conditions are am...
Published in Journal of Materials Science: Materials in Medicine
Rapid re-endothelialization at an atherosclerotic lesion after stent employment is essential for reducing or preventing local thrombus formation and restenosis. To prevent these complications via enhanced rapid re-endothelialization, poly n-butyl methacrylate (PPBMA) coating was deposited on the stent surface through a radio-frequency plasma polyme...
Published in Metallurgist
Published in Journal of Materials Science: Materials in Electronics
Electrical characterization of Al/SiNx:H/InP structures shows that ECR nitrogen plasma cleaning of InP surfaces gives rise to a noticeable improvement in the interface quality, whereas insulator and semiconductor bulk properties are maintained at a level sufficient to be used as the gate dielectric in MIS devices. Nitrogen plasma exposure was carri...
Thin films of camphoric carbon, a natural source, have been deposited on a single crystal Si (100) surface, 2 degrees off towards [011] and quartz/glass substrates, at room temperature, by both electron and ion beam deposition. The crystal structure, composition analysis, surface morphology and other optical properties of these films have been stud...
