Durin, Paule
Dans un monde où la place du numérique est de plus en plus importante, les puces électroniques sont devenues essentielles au fonctionnement de la société actuelle. Les étapes de lithographie sont des étapes clés de la fabrication de ces dernières et représentent environ 30% du cout d’une puce. Les résines, solvants et développeurs nécessaires pour ...
OLaughlin, Richard Forrest, Emerald Hasty, Jeff Hao, Nan
For several decades, aging in Saccharomyces cerevisiae has been studied in hopes of understanding its causes and identifying conserved pathways that also drive aging in multicellular eukaryotes. While the short lifespan and unicellular nature of budding yeast has allowed its aging process to be observed by dissecting mother cells away from daughter...
Laborde, Adrian Mazenq, Laurent Bourrier, David Conédéra, Véronique Courson, Rémi
Marzouk, Ibtihel
La thèse adresse une thématique en plein essor, les capteurs chimiques optiques, dont une application phare est la surveillance en temps réel des cultures cellulaires pour le biomédical. Ces capteurs opèrent par la quantification de paramètres physico-chimiques, e.g. la concentration d’oxygène dissous (OD) qui est un indicateur de la formation, cro...
Jahangiri, Mojtaba Pawluczyk, Jaroslaw Dąbrowski, Karol Nihtianov, Stoyan
In modern nano-scale lithography, an essential role of the source, the illumination, and projection lenses is to deliver the precise amount of energy at a specific wavelength to the photoresist deposited on a wafer surface during exposure. Unfortunately, the source of the most advanced lithography processes may produce unwanted infrared components ...
Sysova, Olha Durin, Paule Gablin, Corinne Léonard, Didier Téolis, Alexandre Trombotto, Stéphane Delair, Thierry Berling, Dominique Servin, Isabelle Tiron, Raluca
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Photolithography is a core part in microelectronic processes. This technological step implies the use of numerous hazardous gold cancerogenic compounds in the formulations, the use of solvents for processing synthetic polymers to obtain micro and nanostructures. We proposed the use of chitosan-based biosourced water-soluble resins to significantly ...
Rudominer, Darius Isaac
The CHIPS and Science Act in 2022 initiated a major push to boost semiconductor manufacturing infrastructure and workforce in the United States. There is a need for scalable and accessible training approaches to contribute to this goal. To address this need, we created an educational puzzle game using Unity 3D to teach broad-level microfabrication ...
Zhang, Junyang
Published in
Journal of Physics: Conference Series
Due to the precision and sizing requirements of popular semiconductor devices nowadays, thickness control and uniformity optimization of the photoresist during the photolithography process are thought to be critical issues for process engineers to consider. In this paper, the parameters affecting photoresist thickness are thoroughly analyzed and an...
Kirscher, Quentin Hajjar-Garreau, Samar Grasset, Fabien Berling, Dominique Soppera, Olivier
Published in
Science and Technology of Advanced Materials
Gómez Martí, Jose María
[ES] La investigación y el desarrollo tecnológico realizado en las últimas décadas ha permitido que actualmente se puedan fabricar estructuras de tamaño microscópico conocidas con en nombre de ¿microestructuras¿. La capacidad de poder crear este tipo de estructuras mediante procesos de fotolitografía da lugar a su vez a grandes avances en la indust...