Computational study of microdischarges driven by electron beam injection with particle-in-cell/Monte Carlo collision sim...
status: published
status: published
Fluid, particle-in-cell and hybrid models are the numerical simulation techniques commonly used for simulating low-temperature plasma discharges. Despite the complexity of plasma systems and the challenges in describing and modelling them, well-organized Simulation methods can provide physical information often difficult to obtain from experiments....
A two-dimensional self-consistent fluid simulation of capacitively coupled rf flow discharges of electronegative plasma with a cylindrically symmetric parallel plate electrode is presented. The model equations include continuity equations, a Poisson equation, and an electron energy balance equation. The two-dimensional distributions of charged part...