We have designed and fabricated integrated photonic micro-resonators (MRs) devices in polymer UV210 on a SiO2 substrate. UV210 is a positive resin that features an absorption band in the deep-UV domain. Such a property allows us to perform photolithography at lower wavelength than the traditional i-line photolithography so as to design smaller and ...
We have designed and fabricated integrated photonic micro-resonators (MRs) devices in polymer UV210 on a SiO2 substrate. UV210 is a positive resin that features an absorption band in the deep-UV domain. Such a property allows us to perform photolithography at lower wavelength than the traditional i-line photolithography so as to design smaller and ...
We have designed and fabricated integrated photonic micro-resonators (MRs) devices in polymer UV210 on a SiO2 substrate. UV210 is a positive resin that features an absorption band in the deep-UV domain. Such a property allows us to perform photolithography at lower wavelength than the traditional i-line photolithography so as to design smaller and ...
We have designed and fabricated integrated photonic micro-resonators (MRs) devices in polymer UV210 on a SiO2 substrate. UV210 is a positive resin that features an absorption band in the deep-UV domain. Such a property allows us to perform photolithography at lower wavelength than the traditional i-line photolithography so as to design smaller and ...
We have designed and fabricated integrated photonic micro-resonators (MRs) devices in polymer UV210 on a SiO2 substrate. UV210 is a positive resin that features an absorption band in the deep-UV domain. Such a property allows us to perform photolithography at lower wavelength than the traditional i-line photolithography so as to design smaller and ...
We have designed and fabricated integrated photonic micro-resonators (MRs) devices in polymer UV210 on a SiO2 substrate. UV210 is a positive resin that features an absorption band in the deep-UV domain. Such a property allows us to perform photolithography at lower wavelength than the traditional i-line photolithography so as to design smaller and ...
We have designed and fabricated integrated photonic micro-resonators (MRs) devices in polymer UV210 on a SiO2 substrate. UV210 is a positive resin that features an absorption band in the deep-UV domain. Such a property allows us to perform photolithography at lower wavelength than the traditional i-line photolithography so as to design smaller and ...
International audience
International audience
International audience
