Engel, Leeya Gaietta, Guido Dow, Liam P Swift, Mark F Pardon, Gaspard Volkmann, Niels Weis, William I Hanein, Dorit Pruitt, Beth L
Published in
Journal of micromechanics and microengineering : structures, devices, and systems
Cryogenic electron tomography is the highest resolution tool available for structural analysis of macromolecular organization inside cells. Micropatterning of extracellular matrix (ECM) proteins is an established in vitro cell culture technique used to control cell shape. Recent traction force microscopy studies have shown correlation between cell ...
Pirouz, Amirabbas Degertekin, F Levent
Published in
Journal of micromechanics and microengineering : structures, devices, and systems
This paper reports an improved CMOS compatible low temperature sacrificial layer fabrication process for Capacitive Micromachined Ultrasonic Transducers (CMUTs). The process adds the fabrication step of silicon oxide evaporation which is followed by a lift-off step to define the membrane support area without a need for an extra mask. This simple ad...
Larsen, T Doll, J C Loizeau, F Hosseini, N Peng, A W Fantner, G Ricci, A J Pruitt, B L
Published in
Journal of micromechanics and microengineering : structures, devices, and systems
Electrothermal actuators have many advantages compared to other actuators used in Micro-Electro-Mechanical Systems (MEMS). They are simple to design, easy to fabricate and provide large displacements at low voltages. Low voltages enable less stringent passivation requirements for operation in liquid. Despite these advantages, thermal actuation is t...
Orbay, Sinem Ozcelik, Adem Bachman, Hunter Huang, Tony Jun
Published in
Journal of micromechanics and microengineering : structures, devices, and systems
We present on-chip acoustic actuation of in situ fabricated artificial cilia. Arrays of cilia structures are UV polymerized inside a microfluidic channel using a photocurable polyethylene glycol (PEG) polymer solution and photomasks. During polymerization, cilia structures are attached to a silane treated glass surface inside the microchannel. Then...
Choi, Jongsoo Wang, Thomas Oldham, Kenn
Published in
Journal of micromechanics and microengineering : structures, devices, and systems
The high performance and small size of MEMS based scanners has allowed various optical imaging techniques to be realized in a small form factor. Many such devices are resonant scanners, and thus their linear and nonlinear dynamic behaviors have been studied in the past. Thin-film piezoelectric materials, in contrast, provide sufficient energy densi...
Yunus, Doruk Erdem Sohrabi, Salman He, Ran Shi, Wentao Liu, Yaling
Published in
Journal of micromechanics and microengineering : structures, devices, and systems
In this paper, we reported a new approach for particle assembly with acoustic tweezer during three-dimensional (3D) printing for the fabrication of embedded conductive wire with 3D structures. A hexagon shaped acoustic tweezer was incorporated with Digital Light Processing (DLP) based stereolithography (SLA) printer to pattern conductive lines via ...
Zamuruyev, Konstantin O Zrodnikov, Yuriy Davis, Cristina E
Published in
Journal of micromechanics and microengineering : structures, devices, and systems
Excellent chemical and physical properties of glass, over a range of operating conditions, make it a preferred material for chemical detection systems in analytical chemistry, biology, and the environmental sciences. However, it is often compromised with SU8, PDMS, or Parylene materials due to the sophisticated mask preparation requirements for wet...
Krakover, Naftaly Ilic, B Robert Krylov, Slava
Published in
Journal of micromechanics and microengineering : structures, devices, and systems
The ability to control nonlinear interactions of suspended mechanical structures offers a unique opportunity to engineer rich dynamical behavior that extends the dynamic range and ultimate device sensitivity. We demonstrate a displacement sensing technique based on resonant frequency monitoring of curved, doubly clamped, bistable micromechanical be...
Orbay, Sinem Ozcelik, Adem Lata, James Kaynak, Murat Wu, Mengxi Huang, Tony Jun
Published in
Journal of micromechanics and microengineering : structures, devices, and systems
We present an acoustofluidic micromixer which can perform rapid and homogeneous mixing of highly viscous fluids in the presence of an acoustic field. In this device, two high-viscosity polyethylene glycol (PEG) solutions were co-injected into a three-inlet PDMS microchannel with the center inlet containing a constant stream of nitrogen flow which f...
Ashtiani, Alireza Ousati Jiang, Hongrui
Published in
Journal of micromechanics and microengineering : structures, devices, and systems
In this paper, we introduce an electrode design for electrohydrodynamically actuated liquid microlenses. The effective electrode areal density radially increases which results in centering of the liquid tunable microlens with a planar device structure. A model was developed to demonstrate the centering mechanism of the liquid microlens. 3D electros...
