Applicant
M Cubed Technologies, Inc.
Grantee
M Cubed Technologies, Inc.
Primary examiner
George B Nguyen
Application number
15900804
Kind
B2
Document number
10242905
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Wafer Pin Chuck Fabrication and Repair

10242905 - 15900804 - USPTO

Application Feb 21, 2018 - Publication Mar 26, 2019

Edward J. Gratrix

Abstract

In a wafer chuck design featuring pins or “mesas” making up the support surface, engineering the pins to have an annular shape, or to contain holes or pits, minimizes sticking of the wafer, and improves wafer settling. In another aspect of the invention is a tool and method for imparting or restoring flatness and roughness to a surface, such as the support surface of a wafer chuck. The tool is shaped such that the contact to the surface being treated is a circle or annulus. The treatment method may take place in a dedicated apparatus, or in-situ in semiconductor fabrication apparatus. The tool is smaller than the diameter of the wafer pin chuck, and may be approximate to the spatial frequency of the high spots to be lapped. The movement of the tool relative to the support surface is such that all areas of the support surface may be processed by the tool, or only those areas needing correction.

Description

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