Applicant
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
Grantee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
Primary examiner
Eric A. Ward
Application number
15983444
Kind
B2
Document number
10290737
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Semiconductor Arrangement with One or More Semiconductor Columns

10290737 - 15983444 - USPTO

Application May 18, 2018 - Publication May 14, 2019

Jean-Pierre Colinge Kuo-Cheng Ching Ta-Pen Guo Carlos H. Diaz

Abstract

A semiconductor arrangement comprises a substrate region and a first semiconductor column projecting from the substrate region. The semiconductor arrangement comprises a second semiconductor column projecting from the substrate region. The second semiconductor column is separated a first distance from the first semiconductor column. The first distance is between about 10 nm to about 30 nm.

Description

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