MICROWAVE INTRODUCTION DEVICE
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Applicant
TOKYO ELECTRON LIMITED
Representative
Finsterwald & Partner GbR Manitz
Application number
EP06832680A1
Kind
A1
Document number
1959484
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MICROWAVE INTRODUCTION DEVICE

1959484 - EP06832680A1 - EPO

Application Nov 15, 2006 - Publication Aug 20, 2008

Caizhong TIAN Tamaki YUASA Toshihisa NOZAWA

Abstract

A microwave introduction device includes a microwave generator for generating a microwave of a predetermined frequency, a mode converter for converting the microwave into a predetermined oscillation mode, a planar antenna member arranged toward a predetermined space, and a coaxial waveguide connecting the mode converter with the planar antenna member to propagate the microwave. A central conductor of the coaxial waveguide is formed in a cylindrical shape, an inner diameter D1 of the central conductor is not smaller than a first predetermined value, and an outer conductor of the central conductor is also formed in a cylindrical shape. A ratio r1/r2 of a radius r1 of an inner diameter of the outer conductor to a radius r2 of an outer diameter of the central conductor is maintained at a second predetermined value and the inner diameter D2 the outer conductor is not greater than a third predetermined value.

Description

Claims

Patent References

Patent Publication Date Title
JPH3191073B N/A N/A
JPH5343334B N/A N/A
JPH9181052B N/A N/A
JP2003332326A N/A N/A
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