MEMBRANE MEMS À LIGNE DE TRANSMISSION INTÉGRÉE
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Grantee
Representative
Cabinet Chaillot
Application number
EP17731220B1
Kind
B1
Document number
3465724
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MEMBRANE MEMS À LIGNE DE TRANSMISSION INTÉGRÉE

3465724 - EP17731220B1 - EPO

Application May 19, 2017 - Publication May 13, 2020

Romain STEFANINI Ling Yan ZHANG Abedel Halim ZAHR

Description

Claims

Patent References

Patent Publication Date Title
EP95307675A2 01/05/1996 Improved switches
EP06121124A2 20/06/2007 Pneumatic MEMS switch and method of fabricating the same
WO2004/030005A1 N/A N/A
US2014184028A1 N/A N/A
EP1798745A N/A N/A
FR3027448 N/A N/A
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