Deposition method over mixed substrates using trisilane
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Grantee
Inc. ASM America
Representative
f & e patent
Application number
EP07022300B1
Kind
B1
Document number
1887617
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Deposition method over mixed substrates using trisilane

1887617 - EP07022300B1 - EPO

Application Feb 12, 2002 - Publication Jul 22, 2020

Michael A. Todd

Description

Claims

Patent References

Patent Publication Date Title
EP0368651A N/A N/A
JP2000351694A N/A N/A
US6235568B N/A N/A
EP89311586A2 16/05/1990 Epitaxial growth process and growing apparatus
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