CVD-REAKTOR MIT FOTODIODEN-ARRAY
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Grantee
Aixtron SE
Representative
Dirk et al Grundmann
Application number
EP05716621B1
Kind
B1
Document number
1716270
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CVD-REAKTOR MIT FOTODIODEN-ARRAY

1716270 - EP05716621B1 - EPO

Application Feb 02, 2005 - Publication Jul 22, 2020

John Trevor MULLINS Johannes KAEPPELER Victor SAYWELL

Description

Claims

Patent References

Patent Publication Date Title
EP1119024A N/A N/A
WO02/08487A N/A N/A
DE10116222A1 N/A N/A
9825843 23/03/1999 Vapor phase processing apparatus
US2003038112A1 N/A N/A
US6221770B1 N/A N/A
US20030038112A1 N/A N/A
JP08170176A N/A N/A
WO0208487A1 N/A N/A
EP95303956B1 16/09/1998 Apparatus for chemical vapour deposition
DE10136858A1 N/A N/A
DE10217806A1 N/A N/A
US6500266B1 N/A N/A

Other References

  • PATENT ABSTRACTS OF JAPAN Bd. 1996, Nr. 11, 29. November 1996 (1996-11-29) -& JP 08 170176 A (HITACHI LTD; HITACHI ELECTRON ENG CO LTD), 2. Juli 1996 (1996-07-02)
  • PATENT ABSTRACTS OF JAPAN Bd. 2003, Nr. 02, 5. Februar 2003 (2003-02-05) -& JP 2002 289601 A (HITACHI KOKUSAI ELECTRIC INC), 4. Oktober 2002 (2002-10-04)
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