AMO GmbH, Advanced Microelectronic Center Aachen (AMICA), Otto-Blumenthal-Strasse 25, 52074,Aachen, German

Plasmonic and hybrid plasmo-photonic integrated waveguide technologies

We present different fabrication techniques we have developed for a range of plasmonic waveguide-based active or passive configurations implemented in data router, sensor or interconnect demonstrators. We have integrated active plasmonic waveguide structures into recesses etched into SOI or silicon nitride photonic chips using either e-beam or opti...